JPS6159676B2 - - Google Patents

Info

Publication number
JPS6159676B2
JPS6159676B2 JP55007059A JP705980A JPS6159676B2 JP S6159676 B2 JPS6159676 B2 JP S6159676B2 JP 55007059 A JP55007059 A JP 55007059A JP 705980 A JP705980 A JP 705980A JP S6159676 B2 JPS6159676 B2 JP S6159676B2
Authority
JP
Japan
Prior art keywords
layer
insulating film
gaas
semiconductor layer
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55007059A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56104472A (en
Inventor
Kenichi Kikuchi
Hideki Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP705980A priority Critical patent/JPS56104472A/ja
Publication of JPS56104472A publication Critical patent/JPS56104472A/ja
Publication of JPS6159676B2 publication Critical patent/JPS6159676B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/66—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes
    • H10D64/68—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes characterised by the insulator, e.g. by the gate insulator
    • H10D64/681—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes characterised by the insulator, e.g. by the gate insulator having a compositional variation, e.g. multilayered
    • H10D64/685—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes characterised by the insulator, e.g. by the gate insulator having a compositional variation, e.g. multilayered being perpendicular to the channel plane
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/751—Insulated-gate field-effect transistors [IGFET] having composition variations in the channel regions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/602—Heterojunction gate electrodes for FETs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/66—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes
    • H10D64/68—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes characterised by the insulator, e.g. by the gate insulator
    • H10D64/691—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes characterised by the insulator, e.g. by the gate insulator comprising metallic compounds, e.g. metal oxides or metal silicates 
JP705980A 1980-01-24 1980-01-24 Semiconductor device Granted JPS56104472A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP705980A JPS56104472A (en) 1980-01-24 1980-01-24 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP705980A JPS56104472A (en) 1980-01-24 1980-01-24 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS56104472A JPS56104472A (en) 1981-08-20
JPS6159676B2 true JPS6159676B2 (en]) 1986-12-17

Family

ID=11655487

Family Applications (1)

Application Number Title Priority Date Filing Date
JP705980A Granted JPS56104472A (en) 1980-01-24 1980-01-24 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS56104472A (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS599971A (ja) * 1982-07-08 1984-01-19 Matsushita Electric Ind Co Ltd 絶縁ゲ−ト電界効果トランジスタ

Also Published As

Publication number Publication date
JPS56104472A (en) 1981-08-20

Similar Documents

Publication Publication Date Title
JP2773487B2 (ja) トンネルトランジスタ
US3609477A (en) Schottky-barrier field-effect transistor
JPH0258773B2 (en])
JPH0435904B2 (en])
JP2604349B2 (ja) 半導体装置
JPH024140B2 (en])
US3263095A (en) Heterojunction surface channel transistors
US3804681A (en) Method for making a schottky-barrier field effect transistor
JPH084138B2 (ja) 半導体装置
US5227644A (en) Heterojunction field effect transistor with improve carrier density and mobility
JPS6359272B2 (en])
JPH023540B2 (en])
JPS61147577A (ja) 相補型半導体装置
JPS6159676B2 (en])
JP2578745B2 (ja) 電界効果トランジスタ
JP2655594B2 (ja) 集積型半導体装置
JPS6292368A (ja) 半導体装置
JP2778447B2 (ja) トンネルトランジスタおよびその製造方法
JPH0468775B2 (en])
JPS6027172A (ja) 電界効果トランジスタ装置
JPS62209866A (ja) 半導体装置
JPH0695531B2 (ja) 電界効果型トランジスタ
JPS60176275A (ja) 集積型半導体装置
JPH0131314B2 (en])
JPH0219623B2 (en])